基于溶胶凝胶法的二氧化锡复合薄膜的制备及表征

2012-05-21 李建昌 东北大学机械工程与自动化学院真空与流体工程中心

  以金属材料硅化物盐SnCl2.2H2O、CuCl2.2H2O和无水无水乙醇为工业原料,用溶胶凝露法治建设备了SnO2和CuO加上的CuO-SnO2塑料膜,一起用X放射性元素衍射、扫视电镜、散发出电镜和电检查是否的云平台对样件做好了定量分析。结果凸显揭示:随之淬火热度的提高,塑料膜沉淀性变好,晶体生长期,电学因素提升,最合适淬火热度判定为450℃。加上CuO的SnO2塑料膜导电性好于同样的的条件下未加上的SnO2塑料膜。SnO2呈六方相金红石结构特征,衍射峰凸显塑料膜中都存在的部分SnO。聚乙二醇的加上提升了SnO2的衍射峰,当小于特定加上量后将能够抑制晶体的生长期,并可使CuO-SnO2塑料膜的导电性呈先减掉后增长的大趋势。丙三醇的加上可很大提升塑料膜的外表面形貌,提升了SnO2的衍射峰,且导电性比较明显变好。   关键的词: 二防防氧化锡;溶胶凝露法;防防氧化铜;夹杂;电学功能   Abstract: The CuO-doped SnO2 composite films were grown in sol-gel method on Si(100) substrates.The impacts of the growth conditions,including the concentrations of Sn and CuO in the solution,annealing temperature,and polyethylene glycol(PEG) addition,on the microstructures and properties of the films were evaluated.The CuO doped composite films and the control sample were characterized with X-ray diffraction,scanning electron microscopy,transmission electron microscopy and electrochemical probe.The results show that the CuO-doping and annealing temperature strongly affect the microstructures and properties of the films.For instance,an increase of the annealing temperature resulted in bigger SnO2 grains,improvement of compactness,and reduction of the sheet resistance.The optimized annealing temperature was found to be 450℃.Addition of a certain amount of PEG and glycerine significantly bettered the crystallization and surface morphology of the films.   Keywords: SnO2 film,Sol-gel method,CuO,Doping,Electrical property   理财产品保险业务: 中间院校大体科研工作开发保险业务费专项计划财政资金(N090403001);; 教导部本科留学归国成员科研工作开发发动理财产品(20091341-4)   选择溶胶妇科凝胶法冶备了四正相金红石多晶节构SnO2 膜, XRD 的特征衍射峰分为相关联(110) , (101) ,(211) 晶面, 图纸不具备金属材质金属材质晶粒度大小度的定向倾向。300热处理的SnO2 膜为非晶状况, 随热处理室内温度变高, 金属材质晶粒度大小度性越来越变好, 金属材质金属材质晶粒度大小度外形尺寸呈先大后提升前景, 电阻功率呈略提升后再大的前景。CuO 的掺入未使得新物相引发, 却控制了SnO2 金属材质金属材质晶粒度大小度生長并激发了膜的电学性能特点, 膜金属材质金属材质晶粒度大小度呈不規則样式形态, 孔径约10 nm。EDS能谱浅析察觉到膜中Sn 没有几乎以SnO2 节构表现形式具备, 还要SnO 相转变成。PEG的加激发了SnO2 的(220) , (002) 晶面的生長, 但当PEG加量达到05g 使开始了显著的控制金属材质金属材质晶粒度大小度生長。CuO-SnO2 膜图纸的导电性随PEG 的加量呈先提升后大的前景, 相处角呈先提升后大前景; 丙三醇的下载改善了膜外壁形貌, 激发了SnO2 的衍射峰, 膜裂缝的规模和长宽比显著的以减少, 导电性显著的变好, 但对相处角不良影响尚小。

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